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MultiSEM – Electron Microscopes

Unleash the acquisition speed of up to 91 parallel electron beams – to image samples in the centimeter scale at nanometer resolution. This unique scanning electron microscope is designed for continuous, reliable 24/7 operation. Simply set up your high-throughput data acquisition workflow and MultiSEM will acquire high-contrast images automatically.

  • Unprecedented imaging speed
  • ​​Automated large-area image acquisition
  • Nanoscale details in the macroscopic context
  • High-contrast images at low noise levels

Revolutionize the Speed of Electron Microscopy

Multiple electron beams working in parallel give you unprecedented gross imaging speed. Acquiring an area of 1 mm2 at 4 nm pixel size takes only a few minutes. The unrivaled acquisition speed of more than 1 TB per hour enables imaging of large volumes (> 1 mm3)  at nanometer resolution. Optimized detectors collect the secondary electron signals very efficiently, providing you with high contrast images at low noise levels.

Image Huge Samples at Nanometer Resolution

Don’t sacrifice sample size for nanometer resolution. MultiSEM is equipped with a sample holder covering an area of 10 cm × 10 cm and built for continuous 24/7 operation. You can finally image the entire sample and discover everything you need to answer your scientific questions. You get the detailed picture‚ without losing the macroscopic context.

Electron Microscopy with ZEN Imaging Software

By introducing ZEN to MultiSEM, we bring the standard software for ZEISS light microscopes to the world of electron microscopy. Control MultiSEM in a straightforward, intuitive way: Smart auto-tuning routines support you as you capture optimal images with high resolution and quality. You quickly set up even complex automated acquisition procedures, adapted and tuned to your sample imaging.

MultiSEM 505
MultiSEM 506

Number of beams



Scan arrangement

Image tile consists of 61 sub images arranged in a hexagonal pattern

Image tile consists of 91 sub images arranged in a hexagonal pattern

Field of view at 12 µm pitch size

108 μm

132 μm

Field of view at 15 µm pitch size (optional)

135 μm

165 μm