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Crossbeam – Focused Ion Beam Scanning Electron Microscopy (FIB-SEM)

Combine imaging and analytical performance of a high resolution field emission scanning electron microscope (FE-SEM) with the processing ability of a next-generation focused ion beam (FIB). You may be working in a multi-user facility, as an academic or in an industrial lab. Take advantage of ZEISS Crossbeam’s modular platform concept and upgrade your system with growing needs, e.g. with the LaserFIB for massive material ablation. During milling, imaging or when performing 3D analytics Crossbeam will speed up your FIB applications.

  • Maximize your SEM insights
  • Increase your FIB sample throughput
  • Experience best 3D resolution in your FIB-SEM analysis

Maximize Your SEM Insights

  • Take advantage of achieving up to 30% better SEM resolution at low voltage using Tandem decel, a feature of the novel ZEISS Gemini electron optics.​
  • Extract true sample information from your high resolution SEM images using Gemini electron optics.​
  • Count on the SEM performance of your Crossbeam for 2D surface sensitive images or when performing 3D tomography​.
  • Benefit from high resolution, contrast and signal-to-noise ratios, even when using very low accelerating voltages​.
  • Characterize your sample comprehensively with a range of detectors. Get pure materials contrast with the unique Inlens EsB detector​
  • Investigate non-conductive specimens undisturbed by charging artifacts.

Increase Your FIB Sample Throughput​

  • Profit from speed and precision of intelligent FIB scanning strategies for material removal and perform your experiments up to 40% faster than before.​
  • The Ion-sculptor FIB column introduces a new way of FIB-processing: by minimizing sample damage you’ll maximize sample quality and perform experiments faster at the same time. ​
  • Manipulate your samples precisely and fast by using up to 100 nA current without compromising FIB resolution.​
  • When preparing TEM samples use the low voltage capabilities of the Ion-sculptor FIB: get ultra-thin samples while keeping amorphization damage at a minimum.​

Experience Best 3D Resolution in Your FIB-SEM Analysis

  • Enjoy the benefits of integrated 3D analysis for EDS and EBSD investigations.​
  • During milling, imaging or when performing 3D analytics Crossbeam will speed up your FIB applications.​
  • Expand the capacity of your Crossbeam with ZEISS Atlas 5, the market-leading package for fast, precise tomography​.
  • Perform EDS and EBSD analysis during tomography runs with the integrated 3D Analytics module of Atlas 5​.
  • Profit from best 3D resolution and leading isotropic voxel size in FIB-SEM tomography. Probe less than 3 nm in depth and produce surface sensitive, material contrast images using the Inlens EsB detector​.
  • Save time by collecting your serial section images while milling. Take advantage of trackable voxel sizes and automated routines for active control of image quality​.

Exploit how vacuum operation and perform in situ experiments with outgassing or charging samples with the Variable Pressure mode. Achieve high quality imaging and high throughput thanks to the unique Gemini electron optics and lon-sculptor FIB

Prepare and characterize your most demanding samples, choosing the chamber size that best suits your samples. The Gemini 2 electron optics enables high resolution, even at low voltage and high current. It’s ideal for high resolution imaging at high beam current and for fast analytics.

Your instrument for massive material ablation and preparation of large samples – the femtosecond laser on the airlock enhances in situ studies, avoids chamber contamination and is configurable with Crossbeam 350 and 550. Gain rapid access to deeply buried structures or prepare extremely large or high-aspect ratio structures e.g. atom probes.