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Axio Imager Vario – Upright Microscope for Large Samples​

Analyze smallest MEMS sensors or an entire flat panel with ZEISS Axio Imager Vario. Its column design allows you to investigate extremely large specimens simultaneously offering high stability. Moreover, Axio Imager Vario is certified for use in clean rooms.

  • Examine large samples​
  • Clean room compatible​
  • In focus at all times

Examine Large Samples

Select a manual or a motorized column, take advantage of being able to investigate specimens with a maximum size of 300 mm × 300 mm and a maximum height of 254 mm. Whether dealing with heavy samples or working in combination with the confocal laser scanning microscope ZEISS LSM for materials – the sturdy column design provides reliable stability and prevents vibrations.​

Certified for Clean Room Work​

Wafer and photomask inspections are subject to extremely strict requirements concerning cleanliness. Therefore, they are done in clean rooms. These are classified according to DIN EN ISO 14644-1, differentiating by number and size of particles per m³. Axio Imager Vario is certified according to this standard and meets the requirements of clean room class 5. Clean room class ISO 5 is equivalent to class 100 of the former standard FED STD 209E (1992).

In Focus at All Times​

When examining reflective, low-contrast surfaces simply equip your Axio Imager Vario with the efficient Hardware Auto Focus. It guarantees high precision for both reflected and transmitted light. The sensor detects changes in the focus position and any deviations are compensated automatically. Even large specimens remain perfectly focused while being moved.

Materials research and industrial production require a focus that ensures high precision levels of max. 0.3 times the objective’s depth of field. Benefit from a focusing system with a lock-in range of up to 12000 µm. Use the auto focus for your applications in reflected light and transmitted light, in brightfield, darkfield, polarization contrast, differential interference contrast and oblique illumination. ​