MET ONE 6003 – Remote, Side Exhaust, Serial Interface, Flow Meter

With a sensitivity range of 0.3 μM-10 μM, data accuracy and repeatability through ISO 21501 compliant calibration, the 6003 meets the specific needs of cleanroom operations within the pharmaceutical, semiconductor, hard disk drive and flat panel display industries. The 6003 is easy to integrate into any facility monitoring system. The 6003 offers accurate and reliable continuous particle monitoring. The long-life laser diode means years of service between replacement parts, plus industry- leading diagnostic features that reduce troubleshooting time and related downtime costs. This build of the 6003 has a flow rate of 0.1 CFM (2.83 LPM), sensitivity of 0.3 μM at 0.1 CFM (2.83 LPM) and a range of 0.3 μM to 10.0 μM at 0.1 CFM (2.83 LPM). Counting efficiency is 50% (± 20%) for 0.3 μM (100% ± 10% at 1.5 times the minimum sensitivity). Fully complies with ISO21501-4. The output is a serial port RS-232. Includes flow, side exhaust and aa ASSY upgrade.