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δTA – Desktop active vibration isolation table

Compact active vibration isolation device that does not require air. It exhibits excellent vibration isolation performance at both low and high frequencies.

  • Control with 6 degrees of freedom active in the vertical direction (Z), 2 horizontal directions (X, Y), and each rotation direction.
  • Exhibits a stable vibration isolation effect regardless of the weight of the mounted device (average load of 0 to 100 kg) and the position of the center of gravity.
  • Equipped with an auto-leveling mechanism that senses the position of the center of gravity of the mounted equipment at startup and automatically adjusts the optimum control balance.
  • Supports cleanroom use by excluding components that could generate dust.
  • This panel uses a VFD (fluorescent display tube) that has a wide viewing angle and is easy to see. Additionally, it has an ON/OFF light source function for use in dark rooms.
Model δTA-56
Control Method 6-DOF feedback control
External dimensions of vibration isolation table (W x D x H mm) 500 × 600 × 92
Surface plate dimensions (W × D mm) 500 × 600
Product mass (kg) 31
Loading weight limit (kg) 100
Power supply Single-phase AC100-200V (50/60Hz)
  • AFM (atomic force microscope), SPM (scanning probe microscope).
  • Laser microscope, laser interferometer.
  • Microscopic hardness tester.
  • Other various precision measuring instruments.

Excellent vibration isolation effect even with no load and a high center of gravity.